Design and analysis of a two layered 3-RRR micro/nano manipulating stage

Recently, many kinds of micro manipulation stages with large stroke and high positioning precision are developed for cell manipulation and optical fiber alignment. In this paper, a 3-DOF micro manipulation stage with dual layers is proposed and PZTs are chosen as the actuators for its high resolution and bandwidth. This mechanism is stacked by two layers and each of floor can make the stage have different rotational direction, namely, clockwise and counter clockwise rotation. In order to extablish an accurate model, the matrix method is adopted and kinematics, dynamics, and simulation based on Simechanics are conducted, the workspace of the stage is derived at last.