Title :
A low frequency impedance matching circuit for a one atmosphere uniform glow discharge plasma reactor
Author :
Zhiyu Chen ; Roth, J.R.
Author_Institution :
Dept. of Electr. Eng., Tennessee Univ., Knoxville, TN, USA
Abstract :
Summary form only given. The one atmosphere uniform glow discharge plasma (OAUGDP) is capable of operating at one atmosphere in air and other gases, and its active species can be used, among other things, to sterilize and decontaminate surfaces. The OAUGDP can be operated in a wide range of geometrical configurations, ranging from a slab plasma between parallel plates, to a surface plasma which can cover an isolated flat or curved surface. In this paper, we will present the design details of two impedance matching circuits which were designed for use with two geometrical configurations of the OAUGD plasma. Experimental data on the performance of this impedance matching circuit, the OAUGDP with which it was operated, and a paired comparison of the power requirements with and without the impedance matching.
Keywords :
glow discharges; impedance matching; plasma devices; active species; curved surface; decontamination; flat surface; geometrical configurations; impedance matching circuits; low frequency impedance matching circuit; one atmosphere uniform glow discharge plasma reactor; parallel plates; slab plasma; sterilization; surface plasma; Atmosphere; Circuits; Frequency; Glow discharges; Impedance matching; Inductors; Nuclear and plasma sciences; Plasma properties; Power supplies; Water;
Conference_Titel :
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location :
Raleigh, NC, USA
Print_ISBN :
0-7803-4792-7
DOI :
10.1109/PLASMA.1998.677887
