Title :
Temperature control of microheaters for localized carbon nanotube synthesis
Author :
Lu, Jingyu ; Xu, Ting ; Miao, Jianmin
Author_Institution :
Sch. of Mech. & Aerosp. Eng., Nanyang Technol. Univ., Singapore, Singapore
Abstract :
A series of finite element thermoelectric coupling simulations on the Ti/Pt/Cr/Au thin film microheater array were conducted. The infrared image of the fabricated microheater device confirmed the simulation results. Based on these simulations, a microheater array was fabricated on Si/SiO2 substrate, and carbon nanotube bundles were grown locally at a temperature of above 650°C while the temperatures in most ungrown area remain below 450°C, which is compatible with current IC process, facilitating the way for carbon nanotubes toward micro/nano electronics applications.
Keywords :
carbon nanotubes; chromium; finite element analysis; gold; metallic thin films; micromechanical devices; nanoelectronics; platinum; titanium; C; Si-SiO2; Ti-Pt-Cr-Au; carbon nanotube bundles; finite element thermoelectric coupling simulations; infrared image; integrated circuit process; localized carbon nanotube synthesis; microelectronics applications; microheater temperature control; nanoelectronics applications; thin film microheater array; Application specific integrated circuits; Carbon nanotubes; Chromium; Finite element methods; Gold; Infrared imaging; Substrates; Temperature control; Thermoelectricity; Transistors;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5424544
