Title :
Laser induced annealing dynamics of photo-electron spectra from silicon field emitter arrays
Author :
Keathley, Phillip D. ; Sell, Alexander ; Putnam, William P. ; Guerrera, Stephen ; Velásquez-García, Luis ; Kärtner, Franz X.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
A marked increase in electron yield, an overall spectral red shift, and the formation of a higher energy peak from Si field emitter arrays (FEAs) are observed in photo-electron spectra throughout a laser annealing process.
Keywords :
electrons; elemental semiconductors; laser beam annealing; silicon; Si; electron yield; field emitter arrays; laser annealing process; laser induced annealing dynamics; photo-electron spectra; Annealing; Electric potential; Free electron lasers; Laser theory; Plasmons; Silicon; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
