• DocumentCode
    1657635
  • Title

    Single trench SiON waveguide TE-TM mode converter

  • Author

    Nakayama, K. ; Shoji, Y. ; Mizumoto, T.

  • Author_Institution
    Tokyo Inst. of Technol., Tokyo, Japan
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A TE-TM mode converter fabricated with a single trench SiON waveguide is described. The device has the advantage that only single mask and etching process is needed to fabricate. 80% TE-TM mode conversion is demonstrated.
  • Keywords
    integrated optics; isolation technology; masks; optical fabrication; optical waveguides; silicon; silicon-on-insulator; Si; TE-TM mode converter; etching; mask process; photonic integrated circuits; single trench waveguide; Etching; Length measurement; Optical device fabrication; Optical waveguides; Periodic structures; Semiconductor waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6325813
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1657635