DocumentCode
1657648
Title
Two dimensional finite difference method for the analysis of piezoelectric devices
Author
Campbell, C.F. ; Weber, R.J.
Author_Institution
Dept. of Electr. Eng. & Comput. Eng., Iowa State Univ., Ames, IA, USA
fYear
1992
Firstpage
477
Abstract
A general finite difference technique is described for the AC steady-state analysis of two-dimensional piezoelectric devices. The method is formulated to accommodate anisotropic and inhomogeneous material as well as variable mesh spacings such that irregular boundaries can be modeled. The method is applied to a bulk acoustic wave resonator and stacked crystal filter structures. For the resonator analysis, the results are compared with published data
Keywords
crystal filters; crystal resonators; finite difference methods; piezoelectric devices; 2D method; AC steady-state analysis; anisotropic material; bulk acoustic wave resonator; finite difference method; inhomogeneous material; irregular boundaries; stacked crystal filter structures; two-dimensional piezoelectric devices; variable mesh spacings; Acoustic waves; Anisotropic magnetoresistance; Crystalline materials; Finite difference methods; Partial differential equations; Piezoelectric devices; Resonator filters; Steady-state; Surface acoustic wave devices; Transient analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location
Tucson, AZ
Print_ISBN
0-7803-0562-0
Type
conf
DOI
10.1109/ULTSYM.1992.275962
Filename
275962
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