DocumentCode :
1657833
Title :
Techniques for SAW device investigation using a high-performance phase-sensitive laser probe
Author :
Jen, Shen ; Domalewski, M.A.
Author_Institution :
Texas Instrum. Inc., Dallas, TX, USA
fYear :
1992
Firstpage :
433
Abstract :
Five experimental techniques with associated data reduction and analysis methods for the use of a high-performance surface acoustic wave (SAW) laser probe are presented. These techniques take advantage of the laser probe´s high dynamic range phase-sensitive measurement capability and are useful for SAW substrate characterization, device physics study, and diagnostics at frequencies up to 1.8 GHz. The first technique is an improved-precision SAW slowness curve measurement method. This method uses multiple excitation frequencies and two transverse scans. The second technique involves detailed analysis methods to separately deduce the losses due to substrate attenuation and wave refraction and diffraction. A third technique applies signal processing techniques to the investigation of off-axis wave propagation effects. The fourth technique involves the examination of the time-domain response via laser probe, which serves in this case as an extremely wideband receiving transducer. The fifth technique involves the detection of bulk wave spurious that is reflected from the underside of the SAW substrate
Keywords :
acoustic signal processing; measurement by laser beam; surface acoustic wave devices; surface acoustic waves; time-domain analysis; ultrasonic measurement; 1.8 GHz; SAW device investigation; SAW substrate characterization; bulk wave spurious; data reduction and analysis; high-performance phase-sensitive laser probe; multiple excitation frequencies; off-axis wave propagation effects; signal processing techniques; slowness curve measurement method; time-domain response; transverse scans; Acoustic measurements; Acoustic waves; Data analysis; Dynamic range; Frequency; Laser theory; Probes; Surface acoustic wave devices; Surface acoustic waves; Surface emitting lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
Type :
conf
DOI :
10.1109/ULTSYM.1992.275967
Filename :
275967
Link To Document :
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