Title :
High frequency surface acoustic wave filter using ZnO/diamond/Si structure
Author :
Nakahata, H. ; Hachigo, A. ; Shikata, S. ; Fujimori, N.
Author_Institution :
Sumitomo Electr. Ind. Ltd., Hyogo, Japan
Abstract :
The surface acoustic wave (SAW) characteristics in a ZnO/diamond/Si structure are studied. Using theoretical calculations, effective film thicknesses of ZnO and diamond providing high phase velocity and K2 are found. Based on these data, a SAW filter of a ZnO/diamond/Si structure is fabricated. It is shown that large velocities can be obtained as expected from theoretical calculation and that a high-frequency SAW filter can be fabricated with much larger scale interdigital transducers (IDTs) than those in conventional material systems. The results indicate that this material system will find broad application in high-frequency SAW filters and resonators
Keywords :
II-VI semiconductors; diamond; piezoelectric semiconductors; piezoelectric thin films; piezoelectric transducers; silicon; surface acoustic wave filters; zinc compounds; HF SAW filter; ZnO-C-Si; ZnO/diamond/Si structure; effective film thicknesses; high phase velocity; interdigital transducers; piezoelectric II-VI semiconductor; Acoustic materials; Acoustic waves; Frequency; Piezoelectric films; SAW filters; Semiconductor films; Substrates; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
DOI :
10.1109/ULTSYM.1992.275978
