DocumentCode
1658457
Title
One-port surface acoustic wave resonator for sensing in liquids
Author
Nomura, T. ; Yasuda, T. ; Furukawa, S.
Author_Institution
Shibaura Inst. of Technol., Tokyo, Japan
fYear
1992
Firstpage
299
Abstract
A one-port resonator utilizing shear horizontal surface acoustic waves (SH-SAWs) has been designed for a sensing element of a liquid phase sensor. SH-SAWs are excited on a 36° rotated Y cut, X propagating LiTaO3 substrate by using interdigital transducers (IDTs). The sensitivity of the resonance frequency and the Q value for the viscosity of liquids are measured. Experimental results show that the Q value and resonance frequency of the SH-SAW resonator vary with the viscosity of the loaded sample liquid
Keywords
acoustic resonators; crystal resonators; electric sensing devices; surface acoustic wave devices; viscometers; viscosity measurement; LiTaO3 substrate; Q-value; interdigital transducers; liquid phase sensor; one-port resonator; resonance frequency; sensitivity; shear horizontal surface acoustic waves; temperature stablity; viscosity of liquids; Acoustic propagation; Acoustic sensors; Acoustic transducers; Acoustic waves; Liquids; Q measurement; Resonance; Resonant frequency; Surface acoustic waves; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location
Tucson, AZ
Print_ISBN
0-7803-0562-0
Type
conf
DOI
10.1109/ULTSYM.1992.275992
Filename
275992
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