Title :
One-port surface acoustic wave resonator for sensing in liquids
Author :
Nomura, T. ; Yasuda, T. ; Furukawa, S.
Author_Institution :
Shibaura Inst. of Technol., Tokyo, Japan
Abstract :
A one-port resonator utilizing shear horizontal surface acoustic waves (SH-SAWs) has been designed for a sensing element of a liquid phase sensor. SH-SAWs are excited on a 36° rotated Y cut, X propagating LiTaO3 substrate by using interdigital transducers (IDTs). The sensitivity of the resonance frequency and the Q value for the viscosity of liquids are measured. Experimental results show that the Q value and resonance frequency of the SH-SAW resonator vary with the viscosity of the loaded sample liquid
Keywords :
acoustic resonators; crystal resonators; electric sensing devices; surface acoustic wave devices; viscometers; viscosity measurement; LiTaO3 substrate; Q-value; interdigital transducers; liquid phase sensor; one-port resonator; resonance frequency; sensitivity; shear horizontal surface acoustic waves; temperature stablity; viscosity of liquids; Acoustic propagation; Acoustic sensors; Acoustic transducers; Acoustic waves; Liquids; Q measurement; Resonance; Resonant frequency; Surface acoustic waves; Viscosity;
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
DOI :
10.1109/ULTSYM.1992.275992
