Title :
A physical compact MOSFET model, including quantum mechanical effects, for statistical circuit design applications
Author :
Rios, Rafael ; Arora, Narain D. ; Huang, Cheng-Liang ; Khalil, Nadim ; Faricelli, John ; Gruber, Len
Author_Institution :
Digital Equipment Corp., Hudson, MA, USA
Abstract :
We present a physical and continuous compact MOSFET model applicable to deep sub-micron devices with very thin gate oxide thicknesses. We focus on the premise that a good compact model should be based on a physical long-channel model that accurately fits both I-V and C-V data. To meet this requirement, we found that the model must account for the correct bias dependency of the surface potential, and include polysilicon depletion and quantum mechanical effects. The resulting model is predictive within a range of the fundamental process parameters, and is thus suitable for statistical circuit simulations
Keywords :
MOSFET; circuit analysis computing; semiconductor device models; surface potential; bias dependency; deep submicron devices; long-channel model; physical compact MOSFET model; polysilicon depletion; quantum mechanical effects; statistical circuit design applications; surface potential; thin gate oxide thicknesses; Capacitance; Capacitance-voltage characteristics; Circuit simulation; Doping; Electric variables measurement; MOSFET circuits; Quantum mechanics; Surface fitting; Threshold voltage; Voltage measurement;
Conference_Titel :
Electron Devices Meeting, 1995. IEDM '95., International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-2700-4
DOI :
10.1109/IEDM.1995.499370