Suspended InN nanobeam resonators: Synthesis, characterization and finite element analysis

High quality InN nanowires (NWs) have been synthesized to obtain suspended nano-resonators for mass detection and volatile organic compound (VOC) sensing applications. The NWs were synthesized using a novel approach that enhanced the cracking of NH₃ precursor and dramatically improving the growth rate and material quality. Suspended InN nanobeam resonators were approached by two different techniques: wet and dry etching following growth process and growing NWs on already patterned trenches. A model similar to the grown structures is simulated using finite element analysis (FEA) and found to have a resolution as low as 5×10^-24 g for attached masses and power consumption in the hundreds of pico-watts when used for VOC sensing.