Title :
Estimation of AFM tip shape and status in linewidth and profile measurement
Author :
Han, Guoqiang ; Jiang, Zhuangde ; Jing, Weixuan
Author_Institution :
State Key Lab. for Manuf. Syst. Eng., Xi´´an, China
Abstract :
A geometric model-based approach is presented to estimate tip shape and status by scanned AFM images and scanned SEM images of AFM tip in linewidth and profile measurement. The interaction between AFM tip and the sample is revealed as tip moves on the sample. The slope angle between the symmetry axis of the tip and the perpendicular to the surface of the investigated sample is characterized as a key parameter of AFM tip status. The method extends the existing characterization methods of AFM tip.
Keywords :
atomic force microscopy; nanostructured materials; scanning electron microscopy; AFM tip shape; geometric model-based approach; linewidth measurement; microscale linewidth; nanoscale linewidth; profile measurement; scanned AFM images; scanned SEM images; Distortion measurement; Geometry; Laboratories; Manufacturing systems; Probes; Scanning electron microscopy; Shape measurement; Solid modeling; State estimation; Testing;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5424591
