Title :
Recent Developments in Silicon-based MEMS Photonic Systems
Author :
Noell, W. ; de Rooij, N.F. ; Epitaux, Marc ; Hauffe, Ralf ; Overstolz, T. ; Pétremand, Yves ; Waldis, S. ; Stanley, R. ; Zamkotsian, F. ; Zickar, M.
Author_Institution :
Inst. of Microtechnol., Univ. of Neuchatel, Neuchatel
Abstract :
Silicon-based photonic MEMS modulate light by displacing microoptical elements such as micromirrors and microlenses. Recent development focus on fiber-laser couplers, multi-object spectrometers, and tunable cavities.
Keywords :
elemental semiconductors; laser cavity resonators; laser tuning; micro-optomechanical devices; microlenses; micromirrors; optical fibre couplers; silicon; Si; fiber-laser couplers; microlenses; micromirrors; microoptical elements; multiobject spectrometers; silicon-based MEMS photonic systems; tunable cavities; Adaptive optics; Lenses; Micromechanical devices; Micromirrors; Microoptics; Mirrors; Optical fiber couplers; Spectroscopy; Tunable circuits and devices; Vertical cavity surface emitting lasers;
Conference_Titel :
Group IV Photonics, 2007 4th IEEE International Conference on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4244-0934-1
DOI :
10.1109/GROUP4.2007.4347660
