Title :
Silicon Microresonators with MEMS-Actuated Tunable Couplers
Author :
Wu, Ming C. ; Yao, Jin ; Lee, Ming-Chang
Author_Institution :
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA
Abstract :
We review the current state-of-the-art of tunable microdisk/microtoroidal resonators with MEMS-actuated couplers. They are key enabling elements of many wavelength-division-multiplexing switches and tunable filters. The performance of dynamic add-drop and bandwidth-tunable filters will be discussed.
Keywords :
elemental semiconductors; integrated optics; micro-optomechanical devices; optical communication equipment; optical couplers; optical filters; optical resonators; optical switches; silicon; wavelength division multiplexing; MEMS-actuation; Si; bandwidth-tunable filters; dynamic add-drop filters; microdisk-microtoroidal resonators; silicon microresonators; tunable couplers; tunable filters; wavelength-division-multiplexing switches; Actuators; Couplers; Coupling circuits; Microcavities; Micromechanical devices; Optical resonators; Resonance; Resonator filters; Silicon; Tunable circuits and devices;
Conference_Titel :
Group IV Photonics, 2007 4th IEEE International Conference on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4244-0934-1
DOI :
10.1109/GROUP4.2007.4347661
