DocumentCode
1659092
Title
High-Q inductors in standard silicon interconnect technology and its application to an integrated RF power amplifier
Author
Burghartz, Joachim N. ; Soyuer, Mehmet ; Jenkins, Keith A. ; Hulvey, Michael D.
Author_Institution
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
fYear
1995
Firstpage
1015
Lastpage
1018
Abstract
This paper presents the highest Qs (up to 24) reported for inductors integrated by using standard silicon technology with multi-level interconnects, and the implementation of such an inductor in an integrated 675 MHz, 100 mW power amplifier
Keywords
BiCMOS analogue integrated circuits; Q-factor; UHF integrated circuits; UHF power amplifiers; inductors; integrated circuit interconnections; silicon; 100 mW; 675 MHz; Si; high-Q inductors; integrated RF power amplifier; multilevel interconnects; standard Si interconnect technology; High power amplifiers; Inductance; Inductors; Integrated circuit interconnections; Microelectronics; Power amplifiers; Power generation; Radio frequency; Radiofrequency amplifiers; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1995. IEDM '95., International
Conference_Location
Washington, DC
ISSN
0163-1918
Print_ISBN
0-7803-2700-4
Type
conf
DOI
10.1109/IEDM.1995.499389
Filename
499389
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