Title :
Characteristics and fabrication of a narrow gap transducer
Author :
Sakairi, N. ; Richie, S.U. ; Casey, K.C. ; Malocha, D.C.
Author_Institution :
NEC Co., Kanagawa, Japan
Abstract :
The fundamental characteristics of a narrow gap transducer are investigated theoretically and experimentally. A surface acoustic wave (SAW) transducer with narrow gaps between electrodes, with a metallization ratio of greater than 90%, has potential application to high frequency devices. A narrow gap transducer doubles the center frequency for a given line width as compared with a conventional transducer. It relaxes the restriction on fabrication and lowers the resistance of the electrodes. The test devices are fabricated by a self-aligned liftoff process without using anodization. The experiment shows no internal reflections and a strong series of harmonics
Keywords :
electrodes; frequency response; harmonics; metallisation; surface acoustic wave filters; ultrasonic transducers; SAW filters; center frequency; electrode resistance; electrodes; fabrication; frequency response; fundamental characteristics; harmonics; high frequency devices; line width; metallization ratio; narrow gap transducer; self-aligned liftoff process; surface acoustic wave; Acoustic transducers; Acoustic waves; Automatic testing; Electrodes; Fabrication; Frequency; Metallization; Reflection; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
DOI :
10.1109/ULTSYM.1992.276048
