Title :
The ePIXnet Silicon Photonics Platform
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Ghent
Abstract :
The ePIXnet silicon photonics platform provides a facility access programme for research and prototyping of silicon-on-insulator nanophotonic devices and circuits, based on cost sharing and CMOS fabrication facilities.
Keywords :
CMOS integrated circuits; elemental semiconductors; integrated optoelectronics; nanoelectronics; optoelectronic devices; silicon; silicon-on-insulator; CMOS fabrication facilities; Si-SiO2; access programme; cost sharing; ePIXnet silicon photonics platform; nanophotonic circuits; silicon-on-insulator nanophotonic devices; CMOS technology; Costs; Fabrication; Gratings; Information technology; Photonic crystals; Photonic integrated circuits; Semiconductor films; Silicon; Waveguide components;
Conference_Titel :
Group IV Photonics, 2007 4th IEEE International Conference on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4244-0934-1
DOI :
10.1109/GROUP4.2007.4347696
