Title :
Characterization of three phase unidirectional transducers
Author :
Garrity, M.E. ; Richie, S.M. ; Malocha, D.C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Central Florida, Orlando, FL, USA
Abstract :
To characterize three phase unidirectional transducer (TPUDT) transmission and reflection properties, a PC-based analysis and mask structure layout program is developed and a study of TPUDT crossover fabrication is performed. The analysis program can be used to calculate the equivalent circuit model elements by charge superposition, thin film loss, matching and phasing elements, and the forward and reverse response of the transducer. The structure program is capable of generating balanced apodized transducers based on user-defined time impulse weighting data. Test devices are designed using a balance apodized structure. A novel TPUDT reflector is produced using a single three-phase transducer with a single inductor. Common dielectrics used for isolation in semiconductor fabrication, including spin on glass (SOG) and polyimide, are evaluated and a reliable fabrication process is developed
Keywords :
acoustic impedance; equivalent circuits; frequency response; surface acoustic wave devices; ultrasonic reflection; ultrasonic transducers; ultrasonic transmission; TPUDT; analysis program; balanced apodized transducers; charge superposition; crossover fabrication; equivalent circuit model elements; forward response; impedance functions; mask structure layout program; matching elements; phasing elements; polyimide; reflection properties; reverse response; spin on glass; thin film loss; three phase unidirectional transducer; time impulse weighting data; transmission properties; Circuit testing; Dielectrics; Equivalent circuits; Fabrication; Glass; Inductors; Performance analysis; Reflection; Thin film circuits; Transducers;
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
DOI :
10.1109/ULTSYM.1992.276060
