Title :
Full-wave 3D analysis of singly- and doubly periodic SAW-structures
Author :
Zidek, H.P. ; Baghai-Wadji, A.R. ; Seifert, F.J.
Author_Institution :
Dept. of Appl. Electron., Vienna Univ. of Technol., Austria
Abstract :
A rigorous method of analysis for 3-D piezoelectric field problems in surface acoustic wave (SAW)-devices is presented. The analysis includes surface as well as bulk acoustic waves. The condition of periodicity leads to coupled series and considerably simplifies the analysis. The input admittances for singly periodic interdigital transducers (IDTs) with finite aperture-lengths and for doubly periodic structures are calculated. The authors´ method makes possible the generalization of the electrostatic element-factor. The proposed element-factor includes bulk-waves and accounts for the finiteness of the electrode-aperture. Brillouin diagrams for 3-D problems are calculated by means of singular value decomposition, which enhances the accuracy of the numerical results
Keywords :
Green´s function methods; acoustic arrays; acoustic field; boundary-value problems; electric fields; series (mathematics); surface acoustic wave devices; ultrasonic transducers; 3D piezoelectric field problems; Brillouin diagrams; LiNbO3; SAW devices; bulk acoustic waves; coupled series; dot arrays; doubly periodic SAW-structures; dual series technique; electrostatic element-factor; finite aperture-lengths; finite electrode aperture; full wave 3D analysis; input admittances; method of moments; numerical results; singly periodic SAW structures; singly periodic interdigital transducers; singular value decomposition; Acoustic waves; Analytical models; Boundary conditions; Dielectric substrates; Electrodes; Electrostatics; Equations; Periodic structures; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
DOI :
10.1109/ULTSYM.1992.276072
