Title :
Fabrication and Characterization of Er doped silicon-rich-silicon nitride(SRSN) microdisks
Author :
Chang, Jee Soo ; Lee, Shinyoung ; Shin, Jung H. ; Shin, Jae-Heon ; Sung, Gun Yong
Author_Institution :
Dept. of Phys., Korea Adv. Inst. of Sci. & Technol., Daejeon
Abstract :
Two types of Er doped silicon-rich silicon nitride (SRSN) based microdisks with different structures were fabricated. Optical property such as quality factors and emission spectrum were measured by using tapered fiber.
Keywords :
Q-factor; erbium; micro-optics; optical fabrication; silicon compounds; Er doping; SiN:Er; emission spectrum; quality factors; silicon-rich-silicon nitride microdisks; tapered fiber; Annealing; Erbium; Etching; Fabrication; Laser excitation; Laser modes; Optical scattering; Photoluminescence; Resists; Silicon;
Conference_Titel :
Group IV Photonics, 2007 4th IEEE International Conference on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4244-0934-1
DOI :
10.1109/GROUP4.2007.4347740
