DocumentCode
1660900
Title
In-situ transmission electron microscopy study of nanotwinned copper under electromigration
Author
Liao, Chien-Neng ; Chen, Kuan-Chia ; Wu, Wen-Wei ; Chen, Lih-Juann ; Tu, K.N.
Author_Institution
Dept. of Mater. Sci. & Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear
2010
Firstpage
254
Lastpage
255
Abstract
Nanotwinned copper has drawn growing attention recently due to its substantially enhanced mechanical strength and negligible increase in electrical resistivity. The stability of nanotwins under mechanical and electrical stressing becomes a critical consideration. Using a high resolution transmission electron microscopy, we observed that the {112} incoherent twin boundary (TB) and {111} coherent TB migrate at a rate of 0.06 ~ 0.09 nm/s in copper under an electric current density of 2Ã106 A/cm2. The TB migration is possibly associated with an atomic step moving along either {111} or {112} plane and the TB migration rate is mainly controlled by the incubation time of forming new atomic steps. To form such atomic steps, EM-induced diffusion at junctions where TBs meet a grain boundary or free surface may play an important role.
Keywords
copper; electromigration; grain boundary diffusion; nanostructured materials; transmission electron microscopy; twin boundaries; Cu; atomic steps; electric current density; electromigration induced diffusion; free surface; grain boundary; in-situ high resolution transmission electron microscopy; incubation time; junction diffusion; nanotwinned copper; twin boundary migration rate; {111} coherent twin boundary; {112} incoherent twin boundary; Anodes; Cathodes; Copper; Current; Electric resistance; Electromigration; Grain boundaries; Sputtering; Stability; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location
Hong Kong
Print_ISBN
978-1-4244-3543-2
Electronic_ISBN
978-1-4244-3544-9
Type
conf
DOI
10.1109/INEC.2010.5424669
Filename
5424669
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