• DocumentCode
    1660900
  • Title

    In-situ transmission electron microscopy study of nanotwinned copper under electromigration

  • Author

    Liao, Chien-Neng ; Chen, Kuan-Chia ; Wu, Wen-Wei ; Chen, Lih-Juann ; Tu, K.N.

  • Author_Institution
    Dept. of Mater. Sci. & Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
  • fYear
    2010
  • Firstpage
    254
  • Lastpage
    255
  • Abstract
    Nanotwinned copper has drawn growing attention recently due to its substantially enhanced mechanical strength and negligible increase in electrical resistivity. The stability of nanotwins under mechanical and electrical stressing becomes a critical consideration. Using a high resolution transmission electron microscopy, we observed that the {112} incoherent twin boundary (TB) and {111} coherent TB migrate at a rate of 0.06 ~ 0.09 nm/s in copper under an electric current density of 2×106 A/cm2. The TB migration is possibly associated with an atomic step moving along either {111} or {112} plane and the TB migration rate is mainly controlled by the incubation time of forming new atomic steps. To form such atomic steps, EM-induced diffusion at junctions where TBs meet a grain boundary or free surface may play an important role.
  • Keywords
    copper; electromigration; grain boundary diffusion; nanostructured materials; transmission electron microscopy; twin boundaries; Cu; atomic steps; electric current density; electromigration induced diffusion; free surface; grain boundary; in-situ high resolution transmission electron microscopy; incubation time; junction diffusion; nanotwinned copper; twin boundary migration rate; {111} coherent twin boundary; {112} incoherent twin boundary; Anodes; Cathodes; Copper; Current; Electric resistance; Electromigration; Grain boundaries; Sputtering; Stability; Transmission electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanoelectronics Conference (INEC), 2010 3rd International
  • Conference_Location
    Hong Kong
  • Print_ISBN
    978-1-4244-3543-2
  • Electronic_ISBN
    978-1-4244-3544-9
  • Type

    conf

  • DOI
    10.1109/INEC.2010.5424669
  • Filename
    5424669