Title :
Analytic model of a silicon nanowire pH sensor
Author :
Yu, Yun Seop ; Park, Hyung-Kun ; Hwang, Sung Woo ; Ahn, Doyeol
Author_Institution :
Dept. of of Inf. & Control Eng., Hankyong Nat. Univ., Anseong, South Korea
Abstract :
An analytic model of silicon nanowire (Si-NW) pH sensor is presented. The model is based on the solution of the cylindrical Poisson equation and the nonlinear Poisson-Boltzmann equation in the Si-NW and the electrolyte, respectively. The results simulated from the proposed model are compared with experimental data.
Keywords :
Poisson equation; chemical sensors; electrolytes; elemental semiconductors; ion sensitive field effect transistors; nanosensors; nanowires; pH measurement; silicon; Si; cylindrical Poisson equation; electrolyte; nonlinear Poisson-Boltzmann equation; pH sensor; silicon nanowire; Biological system modeling; Biosensors; Circuit simulation; Dielectric constant; Nanobioscience; Poisson equations; Quantum computing; Sensor systems; Signal processing; Silicon;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5424671
