Stabilization of power consumption of the heater of a micromachined silicon gas flow sensor

Author

Nassiopoulos, A.A. ; Kaltsas, G. ; Nassiopoulou, A.G.

Author_Institution

Dept. of Electron., Technol. Educational Instn. of Athens, Greece

Volume

1

fYear

2001

fDate

6/23/1905 12:00:00 AM

Firstpage

121

Abstract

In this paper, an electronic circuit designed to compensate changes in power consumption of the heater of a micromachined silicon gas flow sensor is presented. The sensor is of the thermal type and uses a polycrystalline silicon resistor on top of a porous silicon area locally formed on the silicon substrate and two thermopiles integrated on both sides of the resistor. Under gas flow, the resistance of the heater undergoes small changes, which have to be compensated by a change in the current in order to keep the power constant

Keywords

electric resistance; elemental semiconductors; flow measurement; gas sensors; heating elements; micromachining; microsensors; porous semiconductors; silicon; thermopiles; Si; constant power; electronic circuit design; gas flow; heater; heater resistance; integrated thermopiles; locally formed porous silicon area; micromachined silicon gas flow sensor; polycrystalline silicon resistor; power consumption change compensation; power consumption stabilization; silicon substrate; thermal type sensor; Electronic circuits; Energy consumption; Fluid flow; Gas detectors; Resistors; Sensor phenomena and characterization; Silicon; Temperature sensors; Thermal sensors; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics, Circuits and Systems, 2001. ICECS 2001. The 8th IEEE International Conference on

Print_ISBN

0-7803-7057-0

Type

conf

DOI

10.1109/ICECS.2001.957692

Filename

957692