Design and Control of a Micro Linear Motor with Integrated Magnetic Guidance

This paper reports on a micro linear stepping motor with an integrated magnetic guidance which is built up using micro fabrication techniques like sputtering, UV depth lithography and electroplating. The results of FEM simulations in order to design the motor and the necessary changes in the layout for the purpose of levitating the traveller without additional components are presented. Using the same windings for the thrust and the levitation force a special control strategy is described and afterwards verified by simulations. At the end measurement results to underlay the FEM model are shown.