Self-consisting modeling of plasma density control using self-excited electron resonance spectroscopy

Summary form only given. In this work, we study the behavior of an inductively coupled, high density plasma reactor (ICP/HDP) under the action of a SEERS-based closed loop control. Our approach employs a period-averaged plasma simulator which allows to predict, for any input power P, the secular evolution of the charge distribution in the plasma bulk, and the spatially resolved capacitance of the boundary sheath. At each time step, an additional post-processor determines the corresponding SEERS signal. (Specifically, it calculates the frequency and damping rate of the dominant self-resonance from the complex two-dimensional conductance matrix, and expresses the results in terms of the equivalent electron density.) The deviation of ns from a fixed set point n/sub F/ is then used to determine the action of the controller, i.e., the new value of the power fed into the coils.