Title :
High performance control of atomic force microscope for high-speed image scanning
Author :
Rana, M.S. ; Pota, Hemanshu R. ; Petersen, Ian R.
Author_Institution :
Sch. of Eng. & Inf. Technol., Univ. of New South Wales, Canberra, ACT, Australia
Abstract :
This paper presents the design of a model predictive control (MPC) scheme with a notch filter for reducing the tracking error of an atomic force microscope (AFM) by damping the resonant mode of the piezoelectric tube (PZT) scanner. The development of a controller for the AFM imaging and scanning speed is illustrated in this paper. Experimental results show that the proposed controller can increase the scanning speed significantly as compared with the existing PI controller.
Keywords :
PI control; atomic force microscopy; damping; image scanners; image sensors; notch filters; piezoelectric devices; predictive control; AFM; MPC; PI controller; PZT scanner; atomic force microscope; damping; high performance control; high-speed image scanning; model predictive control; notch filter; piezoelectric tube scanner; Creep; Damping; Frequency measurement; Hysteresis; Imaging; Phase measurement; Vibrations;
Conference_Titel :
Control Automation Robotics & Vision (ICARCV), 2012 12th International Conference on
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4673-1871-6
Electronic_ISBN :
978-1-4673-1870-9
DOI :
10.1109/ICARCV.2012.6485355
