Title :
A Tool for CAE of Inductively Coupled Plasma Sources
Author :
Kolobov, V.I. ; Wu, H-M. ; Krishnan, A.
Author_Institution :
CFD Research Corporation, Huntsville, AL
Abstract :
Summary form only given.
Keywords :
Computer aided engineering; Electron beams; Plasma accelerators; Plasma applications; Plasma density; Plasma measurements; Plasma simulation; Plasma sources; Plasma temperature; Plasma waves;
Conference_Titel :
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location :
Raleigh, NC, USA
Print_ISBN :
0-7803-4792-7
DOI :
10.1109/PLASMA.1998.677920
