DocumentCode :
1665161
Title :
Presheaths in multi-dipole plasma
Author :
Hala, A.R. ; Hershkowitz, Noah
Author_Institution :
Wisconsin Univ., Madison, WI, USA
fYear :
1998
Firstpage :
307
Lastpage :
308
Abstract :
Summary form only given. Measurements of plasma presheath thickness as a function of pressure (0.5 to 2 mTorr) were made in a DC hot-filament produced multi-dipole plasma discharge. The presheath plasma potential near a negatively biased plate (D=10 cm) was mapped with an emissive probe. The inflection point method in the limit of zero emission was used. The probe measurement of the plasma potential were accurate to approximately 0.1 V. Measurements were made in plasmas based on nitrogen, argon and combinations of both gases. Experimental results were similar to those found in ECR magnetized plasmas. The presheaths were found to be regions of approximately constant electric field with characteristic lengths the order of the ion-neutral collision lengths. The results show contraction of the presheath as the pressure increased. Two competing processes affect the presheath. These are ionization and collisions with ionization becoming more important at lower pressures. Experimental results are compared to various presheath models.
Keywords :
plasma diagnostics; plasma pressure; plasma sheaths; 0.5 to 2.0 mtorr; DC hot-filament produced multi-dipole plasma discharge; ECR magnetized plasmas; characteristic lengths; contraction; electric field; emissive probe; inflection point method; ion+neutral collision lengths; ionization; multidipole plasma; negatively biased plate; plasma collisions; plasma potential; plasma presheath thickness measurement; plasma pressure dependence; presheath plasma potential; Argon; Gases; Ionization; Magnetic field measurement; Nitrogen; Plasma measurements; Plasma properties; Pressure measurement; Probes; Thickness measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location :
Raleigh, NC, USA
ISSN :
0730-9244
Print_ISBN :
0-7803-4792-7
Type :
conf
DOI :
10.1109/PLASMA.1998.677922
Filename :
677922
Link To Document :
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