Title :
Power-efficient readout circuit for miniaturized electronic nose
Author :
Petrescu, Violeta ; Pettine, Julia ; Karabacak, Devrez M. ; Vandecasteele, Marianne ; Calama, Mercedes Crego ; Van Hoof, Chris
Author_Institution :
imec - Holst Centre, Eindhoven, Netherlands
Abstract :
A hybrid combination of piezoelectric MEMS resonators and CMOS oscillator readout circuit forms the necessary ingredients of a new generation of electronic nose (e-nose) devices that, owing to their form factor and power consumption, enable a range of novel applications. This paper presents a hybrid low-power, high-resolution e nose system, including the necessary digital interface. An integrated readout was designed for the tracking of resonant frequency shift due to a change in the VOC environment concentration. It interfaces a piezo-actuated functionalized doubly clamped beam resonator that combines low actuation power (μW), high VOC sensitivity but low quality factor in air, large parasitic capacitance and multiple resonance modes. The sensor characteristics translate into a challenging readout design, as high gain-bandwidth product versus low power and low noise are required for optimal detection resolution.
Keywords :
CMOS integrated circuits; electronic noses; low-power electronics; micromechanical resonators; readout electronics; CMOS oscillator readout circuit; VOC environment concentration; VOC sensitivity; digital interface; functionalized doubly clamped beam resonator; high-resolution e-nose system; low-power e-nose device; miniaturized electronic nose; multiple resonance mode; parasitic capacitance; piezoelectric MEMS resonator; power-efficient readout circuit; quality factor; resonant frequency; Application specific integrated circuits; CMOS integrated circuits; Ethanol; Gain control; Oscillators; Resonant frequency; Sensors;
Conference_Titel :
Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2012 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4673-0376-7
DOI :
10.1109/ISSCC.2012.6177030