Robust design of subwavelength grating mirror for mid-infrared VCSEL application

Author

Chevallier, Christyves ; Genty, Frédéric ; Fressengeas, Nicolas ; Jacquet, Joel

Author_Institution

SUPELEC, Metz, France

fYear

2011

Firstpage

125

Lastpage

126

Abstract

We present the design of a Si/Si₃N₄ subwavelength grating mirror optimized for an integration in mid-infrared VCSEL. The definition of a quality factor adapted to VCSEL requirements and maximized by an optimization algorithm allowed us to obtain a polarization selective and high reflectivity structure. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances.

Keywords

elemental semiconductors; laser cavity resonators; laser mirrors; light polarisation; optical design techniques; optical fabrication; optimisation; physics computing; reflectivity; silicon; silicon compounds; surface emitting lasers; Si-Si₃N₄; fabrication error; grating dimension tolerances; high reflectivity structure; midinfrared VCSEL application; optimization algorithm; polarization selective structure; quality factor; robust design; robustness; subwavelength grating mirror; Bandwidth; Fabrication; Gratings; Mirrors; Optimization; Silicon; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Numerical Simulation of Optoelectronic Devices (NUSOD), 2011 11th International Conference on

Conference_Location

Rome

ISSN

2158-3234

Print_ISBN

978-1-61284-876-1

Electronic_ISBN

2158-3234

Type

conf

DOI

10.1109/NUSOD.2011.6041173

Filename

6041173