• DocumentCode
    1666285
  • Title

    Self-aligned silicon fins in metallic slits as a platform for planar tunable nanoscale resonant photodetectors

  • Author

    Balram, Krishna C. ; Miller, David A B

  • Author_Institution
    Edward L. Ginzton Lab., Stanford Univ., Stanford, CA, USA
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate self-aligned fabrication of etched silicon fins in metallic slits and show that this structure supports both dielectric and plasmonic resonances and photodetection that can be tuned by varying the width of the fin.
  • Keywords
    elemental semiconductors; nanophotonics; optical fabrication; photodetectors; silicon; Si; dielectric resonances; metallic slits; photodetection; planar tunable nanoscale resonant photodetectors; plasmonic resonances; self-aligned fabrication; self-aligned fins; Absorption; Detectors; Dielectrics; Fabrication; Metals; Plasmons; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6326126
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1666285