Title :
X-ray imaging detector silicon field emission tip array energy conversion
Author :
Wang, Yu ; Hunt, Charles E. ; Diawara, Yacouba ; Thorson, Timothy
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA
Abstract :
We present here an X-ray detector based on Si field-emission tip technology. The X-ray is first converted to EHPs in the substrate Si The electrons are emitted into vacuum from spatially-distinct nanoscale field emission tips fabricated on the back-side of the conversion layer, and detected using an imaging multi-channel plate (MCP).
Keywords :
X-ray detection; X-ray imaging; electron field emission; elemental semiconductors; photon counting; silicon; Si; X-ray imaging detector; conversion layer; field emission tip array energy conversion; imaging multichannel plate; nanoscale field emission tips; Dynamic range; Energy conversion; Energy resolution; Image converters; Photonics; Sensor arrays; Silicon; X-ray detection; X-ray detectors; X-ray imaging;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619480
