DocumentCode
1666736
Title
High current density carbon nanotube FEAs grown by DC plasma CVD
Author
Hsu, David S.Y. ; Shaw, Jonathan L.
Author_Institution
Naval Res. Lab., Washington, DC, USA
fYear
2005
Firstpage
68
Lastpage
69
Abstract
High currents from carbon nanotubes grown inside arrays of gated silicon posts are measured using a DC plasma CVD reactor. The arrays occupying ∼0.1 mm2 area typically delivered at least 100 μA total current to an anode, with similar currents intercepted by the gate. Currents in excess of 100 μA could be sustained for many hours with short term fluctuations below 1%. Several arrays delivered roughly 1 mA. The highest currents (equivalent to 1 A/cm2) occurred at gate potentials near 60 V, giving transconductance values exceeding 100 μS or 100 mS/cm2.
Keywords
carbon nanotubes; field emitter arrays; plasma CVD; C; DC plasma CVD; FEA; anode; carbon nanotube; field emitter arrays; gate potential; short term fluctuation; transconductance; Anodes; Carbon nanotubes; Current density; Current measurement; Fluctuations; Inductors; Plasma density; Plasma measurements; Silicon; Transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN
0-7803-8397-4
Type
conf
DOI
10.1109/IVNC.2005.1619488
Filename
1619488
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