DocumentCode :
1666736
Title :
High current density carbon nanotube FEAs grown by DC plasma CVD
Author :
Hsu, David S.Y. ; Shaw, Jonathan L.
Author_Institution :
Naval Res. Lab., Washington, DC, USA
fYear :
2005
Firstpage :
68
Lastpage :
69
Abstract :
High currents from carbon nanotubes grown inside arrays of gated silicon posts are measured using a DC plasma CVD reactor. The arrays occupying ∼0.1 mm2 area typically delivered at least 100 μA total current to an anode, with similar currents intercepted by the gate. Currents in excess of 100 μA could be sustained for many hours with short term fluctuations below 1%. Several arrays delivered roughly 1 mA. The highest currents (equivalent to 1 A/cm2) occurred at gate potentials near 60 V, giving transconductance values exceeding 100 μS or 100 mS/cm2.
Keywords :
carbon nanotubes; field emitter arrays; plasma CVD; C; DC plasma CVD; FEA; anode; carbon nanotube; field emitter arrays; gate potential; short term fluctuation; transconductance; Anodes; Carbon nanotubes; Current density; Current measurement; Fluctuations; Inductors; Plasma density; Plasma measurements; Silicon; Transconductance;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
Type :
conf
DOI :
10.1109/IVNC.2005.1619488
Filename :
1619488
Link To Document :
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