• DocumentCode
    1666736
  • Title

    High current density carbon nanotube FEAs grown by DC plasma CVD

  • Author

    Hsu, David S.Y. ; Shaw, Jonathan L.

  • Author_Institution
    Naval Res. Lab., Washington, DC, USA
  • fYear
    2005
  • Firstpage
    68
  • Lastpage
    69
  • Abstract
    High currents from carbon nanotubes grown inside arrays of gated silicon posts are measured using a DC plasma CVD reactor. The arrays occupying ∼0.1 mm2 area typically delivered at least 100 μA total current to an anode, with similar currents intercepted by the gate. Currents in excess of 100 μA could be sustained for many hours with short term fluctuations below 1%. Several arrays delivered roughly 1 mA. The highest currents (equivalent to 1 A/cm2) occurred at gate potentials near 60 V, giving transconductance values exceeding 100 μS or 100 mS/cm2.
  • Keywords
    carbon nanotubes; field emitter arrays; plasma CVD; C; DC plasma CVD; FEA; anode; carbon nanotube; field emitter arrays; gate potential; short term fluctuation; transconductance; Anodes; Carbon nanotubes; Current density; Current measurement; Fluctuations; Inductors; Plasma density; Plasma measurements; Silicon; Transconductance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
  • Print_ISBN
    0-7803-8397-4
  • Type

    conf

  • DOI
    10.1109/IVNC.2005.1619488
  • Filename
    1619488