Title :
Linewidth of surface micro-machined MEMS tunable VCSELs at 1.5μm
Author :
Gierl, C. ; Gruendl, T. ; Zogal, K. ; Grasse, C. ; Davani, H.A. ; Böhm, G. ; Küppers, F. ; Meissner, P. ; Amann, M.-C.
Author_Institution :
Inst. fuer Mikrowellentech. und Photonik, Tech. Univ. Darmstadt, Darmstadt, Germany
Abstract :
We demonstrate the linewidth characteristics of a micro-electro-mechanical system (MEMS) widely tunable VCSEL based on a newly developed surface micro-machining technology. The minimal linewidth is 98MHz at thermal rollover.
Keywords :
laser transitions; laser tuning; laser variables measurement; micro-optomechanical devices; micromachining; semiconductor lasers; spectral line breadth; surface emitting lasers; MEMS; VCSEL; frequency 98 MHz; laser tuning; linewidth characteristics; microelectromechanical system; surface micromachining; thermal rollover; wavelength 1.5 mum; Micromechanical devices; Optical feedback; Optical interferometry; Optical pumping; Optical resonators; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6