Title :
Proton Beam Writing micro fabrication system for micro chemical devices
Author :
Truong, Phi Nguyen ; Teshima, Ryo ; Hasegawa, Tadahiro ; Nishikawa, Hiroyuki
Author_Institution :
Dept of Electr. Eng., Shibaura Inst. of Technol., Tokyo, Japan
Abstract :
The authors have been developing a flexible micro fabrication system using Proton Beam Writing (PBW) for micro chemical devices. The system enable to fabricate the various kind of shape in XY stage, increase the productivity and meet the requirement of fabricate in the centimeter ranger. The flexible system transforms licensed 3D CAD (Computer Aided Design) data to pattern data that is used to control the XY stage of the PBW system. The experimental results showed a brightly future of proton beam in micro fabrication.
Keywords :
CAD; lithography; microfabrication; production engineering computing; 3D CAD; PBW; computer aided design; direct -writer lithography process; flexible system transforms; micro chemical devices; proton beam writing micro fabrication system; Design automation; Production; Transforms;
Conference_Titel :
Micro-NanoMechatronics and Human Science (MHS), 2010 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
978-1-4244-7995-5
DOI :
10.1109/MHS.2010.5669508
