Hybrid integrated optoelectronic package for fiber optic receivers and transmitters

The primary focus of this paper is on the development of optical waveguide materials for use in a hybrid multilayer multichip module (MCM) incorporating fiber optics and integrated optoelectronic circuitry. Germanium oxide (GeO₂) is selected as the waveguide material to be investigated. The paper discusses the preparation/formulation of the GeO₂ materials, the various deposition techniques, and the effect of material composition and processing techniques on the optical properties, namely the index of refraction and the absorbance. The development and evaluation of two types of thin film GeO₂ and six modifications of thick film GeO₂ are presented in this work. All of the processes are designed to maximize the use of existing microelectronics fabrication techniques and facilities