Title :
Transparent thin film transistors based on parallel array of Si nanowires
Author :
Lee, Dong Hyun ; Choung, Jae Woong ; Pyun, Yong Bum ; Son, Kwangsoo ; Park, Won Il
Author_Institution :
Dept. of Mater. Sci. & Eng., Hanyang Univ., Seoul, South Korea
Abstract :
We report on the fabrication of fully transparent thin-film transistors (T-TFTs) by implementing the aligned silicon nanowires (SiNWs) and Ga-doped ZnO thin films as transparent channels and transparent conducting electrodes, respectively. The SiNWs aligned on the glass substrates are highly transparent in the visible spectral range, with a transmittance of ~90% for the NW density of ~2-3 ¿m-1. In addition, polarization-dependent measurements reveal the variation of transmittance in the range of 75-95% with respect to the angle between polarization of incident light and the NW axis. Gate dependent transport measurements demonstrated that the boron-doped SiNW devices behaved as p-type TFTs with good characteristics in terms of transconductance and switching behavior.
Keywords :
II-VI semiconductors; arrays; boron; elemental semiconductors; gallium; nanoelectronics; nanofabrication; nanowires; semiconductor quantum wires; semiconductor thin films; silicon; thin film transistors; transparency; visible spectra; wide band gap semiconductors; zinc compounds; Si:B; SiO2; T-TFT fabrication; ZnO:Ga; aligned silicon nanowires; boron doped SiNW device; gate dependent transport property; glass substrate; incident light polarization; p-type TFT; silicon nanowire parallel array; switching property; transconductance; transmittance; transparent channels; transparent conducting electrodes; transparent thin film transistor; visible spectral range transparency; Electrodes; Fabrication; Glass; Nanowires; Optical polarization; Semiconductor thin films; Silicon; Substrates; Thin film transistors; Zinc oxide;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5424905