Title :
Silicon optomechanics
Author :
Roels, J. ; Maes, B. ; Baets, R. ; Van Thourhout, D.
Author_Institution :
INTEC Dept., Ghent Univ.-imec, Ghent, Belgium
Abstract :
Optomechanics might provide the key to realize various signal processing functions on a chip. In this proceeding we focus on silicon Nano-Optomechanical Systems (NOMS) and provide an overview of several types of optomechanical devices.
Keywords :
elemental semiconductors; nanophotonics; silicon; Si; optomechanical devices; signal processing functions; silicon nano-optomechanical systems; silicon optomechanics; Force; Optical interferometry; Optical ring resonators; Optical sensors; Optical waveguides; Planar waveguides;
Conference_Titel :
Photonics Society Summer Topical Meeting Series, 2010 IEEE
Conference_Location :
Playa del Carmen
Print_ISBN :
978-1-4244-3730-6
Electronic_ISBN :
978-1-4244-3731-3
DOI :
10.1109/PHOSST.2010.5553665
