Title :
Control and sensing platform of magnetically driven microtool for on-chip single cell evaluation
Author :
Kawahara, Tomohiro ; Hagiwara, Masaya ; Yamanishi, Yoko ; Arai, Fumihito
Author_Institution :
Grad. Sch. of Eng., Nagoya Univ., Nagoya, Japan
Abstract :
In this paper, we discuss a development of control and sensing platform for an on-chip single cell evaluation by magnetically driven microtool (MMT). The design and fabrication of the MMT is shown. Through the basic experiments, the advantage of the proposed platform, the performance of the position control (positioning accuracy: 30 μm), and the force sensing (sensing accuracy: 100 μN) of the MMT are confirmed.
Keywords :
bioMEMS; biomagnetism; cellular biophysics; force sensors; medical control systems; microsensors; position control; force sensing; magnetically driven microtool; on-chip single cell evaluation; position control; Displacement measurement; Glass; Magnetic force microscopy; Micromanipulators; Microscopy; Silicon; Thickness measurement;
Conference_Titel :
Micro-NanoMechatronics and Human Science (MHS), 2010 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
978-1-4244-7995-5
DOI :
10.1109/MHS.2010.5669528
