• DocumentCode
    1667608
  • Title

    Fabrication of photoresist microlens arrays

  • Author

    Alhokail, Hamad S.

  • fYear
    1998
  • fDate
    6/20/1905 12:00:00 AM
  • Firstpage
    49
  • Lastpage
    52
  • Abstract
    Microlens arrays are used in optical systems to direct light from sources to detectors. In this paper the method of melted photoresist is used to fabricate an array of microlenses. The experimental results as well as the main processing factors that affect the uniformity of such lenses are presented
  • Keywords
    integrated optics; integrated optoelectronics; microlenses; optical arrays; optical fabrication; photoresists; fabrication method; melted photoresist; micro optics; optical systems; photoresist microlens arrays; Fabrication; Glass; Indium phosphide; Lenses; Manufacturing; Microoptics; Optical arrays; Resists; Shape; Spinning;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 1998. ICM '98. Proceedings of the Tenth International Conference on
  • Conference_Location
    Monastir
  • Print_ISBN
    0-7803-4969-5
  • Type

    conf

  • DOI
    10.1109/ICM.1998.825565
  • Filename
    825565
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1667608