Title :
Polymer-assisted deposition of Co-doped zinc oxide thin film for the detection of aromatic organic compounds
Author :
Li, Wei ; Kim, Dojin
Author_Institution :
Dept. of Mater. Sci. & Eng., Chungnam Nat. Univ., Daejeon, South Korea
Abstract :
Cobalt-doped Zinc oxide thin film was deposited onto SiO2/Si substrate using polymer-assisted deposition method. The surface morphology, phase structure and chemical state of the thin film were characterized by SEM, XRD, and XPS. The gas-sensing characteristics of the thin film upon exposure to aromatic organic compound vapors were investigated with a home-made sensor measurement system. The current results show that the film morphology is influenced by the doping of Co, and the sensor behavior was quite different between undoped and Co-doped ZnO thin films.
Keywords :
II-VI semiconductors; X-ray diffraction; X-ray photoelectron spectra; cobalt; gas sensors; liquid phase deposition; scanning electron microscopy; semiconductor growth; semiconductor thin films; surface morphology; thin film sensors; wide band gap semiconductors; zinc compounds; SEM; Si; SiO2-Si; XPS; XRD; ZnO:Co; aromatic organic compound vapors; chemical state; doping; gas-sensing characteristics; home-made sensor measurement system; phase structure; polymer-assisted deposition; surface morphology; thin film; Chemicals; Organic compounds; Polymer films; Semiconductor thin films; Sensor phenomena and characterization; Sputtering; Substrates; Surface morphology; Thin film sensors; Zinc oxide;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5424927
