Title :
GHz optomechanical wheel and disk resonators with high mechanical Q factors in air
Author :
Sun, Xiankai ; Zhang, Xufeng ; Fong, King Y. ; Xiong, Chi ; Pernice, Wolfram H P ; Tang, Hong X.
Author_Institution :
Dept. of Electr. Eng., Yale Univ., New Haven, CT, USA
Abstract :
Wheel- and disk-shaped Si optomechanical resonators are demonstrated with frequency up to 1.75 GHz and mechanical Q factors as high as 4370 at 1.41 GHz measured in air. Displacement sensitivity of 4.16×10-17 m/Hz1/2 is achieved.
Keywords :
Q-factor; elemental semiconductors; micro-optics; micromechanical resonators; optical resonators; silicon; wheels; GHz optomechanical wheel; Si; air; disk resonators; disk-shaped Si optomechanical resonators; displacement sensitivity; high mechanical Q factors; wheel-shaped Si optomechanical resonators; Mechanical variables measurement; Optical resonators; Optical sensors; Q factor; Radio frequency; Resonant frequency; Wheels;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
