Title :
A platform for on-chip silica optomechanical oscillators with integrated waveguides
Author :
Grutter, Karen E. ; Grine, Alejandro ; Myung-Ki Kim ; Quack, Niels ; Rocheleau, Tristan ; Nguyen, Clark T.-C ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, CA, USA
Abstract :
We present a new phosphosilicate glass photonic integrated circuit platform for optomechanical systems. Wafer-scale reflow enables high-Q (1.5×106) resonators and closely-spaced (250nm) waveguides. Optomechanical resonance (71.9MHz) is demonstrated.
Keywords :
integrated optics; optical glass; optical resonators; optical waveguides; oscillators; phosphosilicate glasses; silicon compounds; SiO2; closely-spaced waveguides; frequency 71.9 MHz; high-Q resonators; integrated waveguides; on-chip silica optomechanical oscillators; optomechanical resonance; phosphosilicate glass; photonic integrated circuit; wafer-scale reflow; Integrated optics; Optical device fabrication; Optical fibers; Optical ring resonators;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
