DocumentCode :
1667893
Title :
Application of SEM with microscopic computer tomography (MCT) to detect multilayer structure IC and VNED
Author :
Liang, Zhuguan ; Xiao, Ling ; Lin, Yiping ; Hu, Wenguo ; Li, Yawen ; Zhou, Kailin ; Hu, Xinghua ; Li, Ping ; Wang, Jian ; Rau, E.I.
Author_Institution :
Dept. of Electr. Eng., Yunnan Univ., Kunming, China
fYear :
2005
Firstpage :
165
Lastpage :
166
Abstract :
It was demonstrated in this paper that the microscopic computer tomography (MCT) method is a helpful method to study the microstructures of integrated circuits (IC) with the multilayer structures, and it is also a helpful method to study microstructures of other devices such as vacuum nano-electron devices (VNED). The scanning electron microscope (SEM) with the MCT method and MCT detector expands the functions of the normal scanning electron microscope, by which not only we can observe the surface microstructures of IC with the multilayer structures below the insulator layers, but also the microstructures of every layer can be layeredly detected below the surface layer.
Keywords :
computerised tomography; monolithic integrated circuits; multilayers; nanoelectronics; scanning electron microscopy; vacuum microelectronics; SEM; insulator layers; integrated circuits; microscopic computer tomography; microstructures; multilayer structure; scanning electron microscope; vacuum nanoelectron devices; Application software; Application specific integrated circuits; Detectors; Insulation; Microstructure; Nonhomogeneous media; Scanning electron microscopy; Semiconductor devices; Semiconductor materials; Tomography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
Type :
conf
DOI :
10.1109/IVNC.2005.1619537
Filename :
1619537
Link To Document :
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