Application of SEM with microscopic computer tomography (MCT) to detect multilayer structure IC and VNED

It was demonstrated in this paper that the microscopic computer tomography (MCT) method is a helpful method to study the microstructures of integrated circuits (IC) with the multilayer structures, and it is also a helpful method to study microstructures of other devices such as vacuum nano-electron devices (VNED). The scanning electron microscope (SEM) with the MCT method and MCT detector expands the functions of the normal scanning electron microscope, by which not only we can observe the surface microstructures of IC with the multilayer structures below the insulator layers, but also the microstructures of every layer can be layeredly detected below the surface layer.