Title :
Fabrication yield analysis and emission failure investigation of silicon field emission arrays
Author :
Wang, L. ; Aplin, K.L. ; Huq, S.E. ; Stevens, R. ; Kent, B.J. ; Malik, A. ; Loader, I.M. ; Thomas, G.R.
Author_Institution :
Rutherford Appleton Laboratory, Central Microstructure Facility, Didcot, UK
Abstract :
A fabrication uniformity and yield analysis for silicon field emission arrays is presented in this paper. Silicon field emission arrays have been chosen for space neutraliser application because of their low power consumption, low mass and volume, and they are more tolerant of the operating environment than metal emitters.
Keywords :
aerospace materials; elemental semiconductors; field emitter arrays; silicon; Si; emission failure investigation; fabrication uniformity; fabrication yield analysis; silicon field emission arrays; Fabrication; Failure analysis; Laboratories; Plasma applications; Probes; Silicon; Space technology; Testing; Wafer bonding; Wire;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619539
