DocumentCode
1668081
Title
SE3 integration in the 3rd dimension: opportunities and challenges
Author
Pileggi, Larry ; Weber, Werner
fYear
2005
Firstpage
18
Lastpage
19
Keywords
Band pass filters; BiCMOS integrated circuits; Circuit synthesis; Clocks; Microswitches; Monolithic integrated circuits; Radiofrequency microelectromechanical systems; Resonator filters; Silicon; System performance;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 2005. Digest of Technical Papers. ISSCC. 2005 IEEE International
Conference_Location
San Francisco, CA
ISSN
0193-6530
Print_ISBN
0-7803-8904-2
Type
conf
DOI
10.1109/ISSCC.2005.1493853
Filename
1493853
Link To Document