• DocumentCode
    1668081
  • Title

    SE3 integration in the 3rd dimension: opportunities and challenges

  • Author

    Pileggi, Larry ; Weber, Werner

  • fYear
    2005
  • Firstpage
    18
  • Lastpage
    19
  • Keywords
    Band pass filters; BiCMOS integrated circuits; Circuit synthesis; Clocks; Microswitches; Monolithic integrated circuits; Radiofrequency microelectromechanical systems; Resonator filters; Silicon; System performance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 2005. Digest of Technical Papers. ISSCC. 2005 IEEE International
  • Conference_Location
    San Francisco, CA
  • ISSN
    0193-6530
  • Print_ISBN
    0-7803-8904-2
  • Type

    conf

  • DOI
    10.1109/ISSCC.2005.1493853
  • Filename
    1493853