Title :
SE3 integration in the 3rd dimension: opportunities and challenges
Author :
Pileggi, Larry ; Weber, Werner
Keywords :
Band pass filters; BiCMOS integrated circuits; Circuit synthesis; Clocks; Microswitches; Monolithic integrated circuits; Radiofrequency microelectromechanical systems; Resonator filters; Silicon; System performance;
Conference_Titel :
Solid-State Circuits Conference, 2005. Digest of Technical Papers. ISSCC. 2005 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-8904-2
DOI :
10.1109/ISSCC.2005.1493853
