Application of Micro Plasma for NOx Removal

Micro plasma is investigated which is occurred between the narrow gap of the electrodes, covered with dielectric materials. The discharge gap is set at an order of micro meters by changing a spacer from 0 to 100 um. In this paper, characteristics of micro plasma, such as discharge voltages, discharge currents and discharge power, which is obtained with the help of Lissajous figures, and the relationships between these electric characteristics are presented. Characteristics of ozone generation by micro plasma electrode are investigated. Treatment by micro plasma for simulated exhaust gas which contains NOx, C₃H₈ as a role of HC and CO, is estimated experimentally. In the absence of O₂, the exhaust gas is decomposed by especially nitrogen atomic species. In the presence of O₂, it is decomposed by nitrogen atomic species and oxidized by ozone. By product analysis of treated gases is carried out by a FT-IR and a GC-MS. When HC, NOx and N₂ are included in the simulated exhaust gas CHN, N₂O and CH₄ are confirmed as byproducts of the micro plasma treatment.