DocumentCode
1668933
Title
Intense electron emission from graphite-nanocrater (GRANC) cold cathode and its application to scanning electron microscopes
Author
Matsumoto, Takahiro ; Neo, Yoichiro ; Mimura, Hidenori
Author_Institution
Res. & Dev. Center, Stanley Electr. Corp., Tsukuba, Japan
fYear
2005
Firstpage
250
Lastpage
251
Abstract
Carbon nanotubes (CNTs) have attracted special interest from the point of view of high brightness point electron sources. The best performance of the brightness was reported for a multi-walled CNT. This characteristic seems to be promising for the fabrication of devices with point electron sources such as scanning electron microscopes and transmission electron microscopes. In this paper, the brightness of electron beam from a graphite-nanocrater GRANC cathode is fabricated onto a conical shaped graphite rod by hydrogen plasma etching. A high density electron emission more than 1 A/cm2 and brightness of the order of 1011-1012 Asr-1m2 are obtained. This high brightness is similar to the highest reported performance for CNTs.
Keywords
brightness; cathodes; electron field emission; etching; graphite; nanostructured materials; scanning electron microscopes; transmission electron microscopes; C; brightness; conical shaped graphite rod; electron beam; electron emission; graphite-nanocrater cold cathode; hydrogen plasma etching; scanning electron microscopes; transmission electron microscopes; Brightness; Carbon nanotubes; Cathodes; Electron beams; Electron emission; Electron sources; Fabrication; Hydrogen; Scanning electron microscopy; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN
0-7803-8397-4
Type
conf
DOI
10.1109/IVNC.2005.1619580
Filename
1619580
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