Title :
Intense electron emission from graphite-nanocrater (GRANC) cold cathode and its application to scanning electron microscopes
Author :
Matsumoto, Takahiro ; Neo, Yoichiro ; Mimura, Hidenori
Author_Institution :
Res. & Dev. Center, Stanley Electr. Corp., Tsukuba, Japan
Abstract :
Carbon nanotubes (CNTs) have attracted special interest from the point of view of high brightness point electron sources. The best performance of the brightness was reported for a multi-walled CNT. This characteristic seems to be promising for the fabrication of devices with point electron sources such as scanning electron microscopes and transmission electron microscopes. In this paper, the brightness of electron beam from a graphite-nanocrater GRANC cathode is fabricated onto a conical shaped graphite rod by hydrogen plasma etching. A high density electron emission more than 1 A/cm2 and brightness of the order of 1011-1012 Asr-1m2 are obtained. This high brightness is similar to the highest reported performance for CNTs.
Keywords :
brightness; cathodes; electron field emission; etching; graphite; nanostructured materials; scanning electron microscopes; transmission electron microscopes; C; brightness; conical shaped graphite rod; electron beam; electron emission; graphite-nanocrater cold cathode; hydrogen plasma etching; scanning electron microscopes; transmission electron microscopes; Brightness; Carbon nanotubes; Cathodes; Electron beams; Electron emission; Electron sources; Fabrication; Hydrogen; Scanning electron microscopy; Transmission electron microscopy;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619580