Title :
Fabrication & characterization of Schottky junction transistors
Author :
Wu, Zhisheng ; Spann, J. ; Jaconelli, P.C. ; Jinman Yang ; Thornton, Trevor J.
Author_Institution :
Center for Solid State Electron. Res., Arizona State Univ., Tempe, AZ, USA
Abstract :
Micropower devices based on weakly inverted CMOS are commonly used in biomedical applications including pacemakers, artificial cochleas and retinas as well as for covert sensing. These devices use very little power but operate at comparatively low frequencies. Recently, the Schottky junction transistor (SJT) has been proposed as an alternative micropower device capable of operating at GHz frequencies. The SJT resembles an enhancement mode SOI MESFET, which uses the gate current to control a larger drain current. The channel thickness and doping are chosen such that the gate and drain currents vary exponentially with the gate voltage while maintaining a current gain (/spl beta/=I/sub d//I/sub g/) greater than unity. We describe experimental measurements that confirm the operating principle of prototype SJT devices. We also perform numerical simulations of a device with L/sub g/=0.5/spl mu/m.
Keywords :
SIMOX; Schottky gate field effect transistors; low-power electronics; semiconductor device measurement; semiconductor device models; 0.5 micron; CoSi/sub 2/; SJT; Schottky junction transistors; Si; biomedical applications; channel doping; channel thickness; current gain; enhancement mode SOI MESFET; low power devices; micropower device; weakly inverted CMOS; Biomedical measurements; Doping; Fabrication; Frequency; MESFETs; Numerical simulation; Pacemakers; Prototypes; Retina; Voltage;
Conference_Titel :
SOI Conference, 2001 IEEE International
Conference_Location :
Durango, CO, USA
Print_ISBN :
0-7803-6739-1
DOI :
10.1109/SOIC.2001.957991