Title :
An automated optical on-wafer probing system for ultra-high-speed ICs
Author :
Shinagawa, Mitsuru ; Nagatsuma, Tadao
Keywords :
Circuit testing; Control systems; Earth Observing System; Electrooptic effects; High speed optical techniques; Instruments; Optical sensors; Probes; Signal generators; Voltage;
Conference_Titel :
Test Conference, 1992. Proceedings., International
Conference_Location :
Baltimore, MD
Print_ISBN :
0-7803-0760-7
DOI :
10.1109/TEST.1992.527907
